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Wafer Defect Detection Series

Semiconductor Wafer Defect Detection Equipment

For the mid stream wafer manufacturing enterprises and downstream packaging and testing enterprises in the semiconductor industry chain, a multi-channel bright and dark field parallel detection system developed independently is adopted to detect the appearance defects of semiconductor wafers and grains with graphics.
Semiconductor Wafer Defect Detection Equipment
Wafer Defect Detection Series
For the mid stream wafer manufacturing enterprises and downstream packaging and testing enterprises in the semiconductor industry chain, a multi-channel bright and dark field parallel detection system developed independently is adopted to detect the appearance defects of semiconductor wafers and grains with graphics.

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PRODUCT DATA


Product advantages:

  • • Available in a variety of sizes

  This equipment can be used for 4-8 inch patterned wafers

  • • Can detect a variety of defects

   Detect defects such as scratch, back collapse, color difference, crack, scratch, metal residue and metal loss

  • • High precision resolution

   System resolution: 0.2-0.8 μ m

  • • Fast detection speed

  Patterned wafer: 15 minutes / wafer when the number of defects is less than 200

 


Sample display:



The gold plating layer falls off

defect detection machine

 

Crackle

defect detection machine

 

Coating surface detection

defect detection machine

 

Scratch

defect detection machine



Item

Main parameters

General parameters

Wafer size

4 ", 6" (Iron frame with blue film)

Number of boxes

2 pcs

Loading and unloading method

Robot, mapping scanning

Motion platform

X stroke 200mm, repetitive accuracy 10μm

Y stroke 45mm，repetitive accuracy 10μm
Z strooke 15mm，repetitive accuracy 5μm

Capacity

4" , 25WPH     6" ,  20WPH

Detection performance

Test accuracy

3 μm

Camera

High resolution industrial camera

Lens

Microlens

Light source

Patented light source

Defect marking

Automatic dotting

Environment requirement

Power supply specification

AC220V，   50Hz

Air source requirements

0 .5-0 .7Mpa compressed air, without obvious water vapor and grease

Using environment

Temperature: 15-40 ℃. Humidity requirement: 30% - 70%, no frost

Overall size

2000mm*1200mm*2250mm


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