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Laser Scribing Series

Nanosecond Laser Scribing Equipment

Nanosecond laser is used for precise dicing of GPP wafers.
Nanosecond Laser Scribing Equipment
Laser Scribing Series
Nanosecond laser is used for precise dicing of GPP wafers.

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PRODUCT DATA


Product advantages:

 

  • High processing quality

The cutting line width is narrow (taking ultraviolet dicing as an example: including HAZ ≤ 30 ± 5 μm) , small edge collapse ≤ 10 μm

 

  • High processing efficiency

UPH ≥ 15 (take 40mil, 5-inch GPP wafer as an example, including automatic loading and unloading)

 

  • Good processing stability

Nanosecond laser has high power stability and good beam quality (M ² < 1.5)

 


Sample display:



 

Front positioning, front cutting: 4-inch flat wafer, grain

laser cutting

 

Front positioning, back cutting: 5-inch GPP wafer

laser cutter



Item

Main parameters

Model

LUD3200

LUD3210

Laser

Center wavelength

~355nm

~1064nm

Cutting head

Self-developed

Self-developed

Performance

Effective working stroke

200x300mm(optional)DD motor

200x300mm(optional)DD motor

Repetitive positioning accuracy

±2μm±5arc sec

±2μm±5arc sec

Visual positioning

Front positioning, front cutting

Front positioning, back cutting

Scribe line width

≤30±5μm

40±5μm

Others

Power supply specification

220V/50Hz/3.5kW

220V/50Hz/3.5kW

Overall size

1150mm*800mm*1700mm

1150mm*800mm*1700mm

Weight

1000 Kg

1000 Kg


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