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Laser Scribing Series

Picosecond Laser Scribing Equipment

Ultra violet picosecond laser is used for precision half cutting or full cutting of silicon and compound semiconductor wafers.
Picosecond Laser Scribing Equipment
Laser Scribing Series
Ultra violet picosecond laser is used for precision half cutting or full cutting of silicon and compound semiconductor wafers.

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PRODUCT DATA


Product advantages

  • High quality

  • Cutting line width is narrow (taking ultraviolet collimation as an example, cutting line width + HAZ ≤ 20 ± 5 μ m) Small edge collapse (≤ 10 μ m)

  • High efficiency

UPH ≥ 10 (UV galvanometer: take 3-inch double mesa silicon diode wafer as an example, including automatic alignment time)

  • Good stability

The laser has high pulse stability (≤ 2% RMS) and high beam quality (M ² ≤1.2)

 


Sample display:


 

Cutting front - 3-inch double mesa diode wafer laser full cutting; Grain size: 300 * 300 μm, Wafer thickness 130 μm, Cutting channel thickness 30 μm.


laser cutter

 

 

Cutting back - 3-inch double mesa diode wafer laser full cutting; Grain size: 300 * 300 μm, Wafer thickness 130 μm, Cutting channel thickness 30 μm.


laser cutter



Item

Main parameters

Model

LUD3200

LUD3210

Laser

Center wavelength

~355nm

~355nm

Cutting head

Laser scanning head

Laser collimator

Performance

Effective working stroke

200x300mm(optional)DD motor

200x300mm(optional)DD motor

Repetitive positioning accuracy

±2μm±5arc sec

±2μm±5arc sec

Visual positioning

Front positioning, front cutting

Front positioning, front cutting

Scribe line width

≤30±5μm

20±5μm

Others

Power supply specification

220V/50Hz/3.5kW

220V/50Hz/3.5kW

Overall size

1500mm*1700mm*2000mm

1500mm*1700mm*2000mm

Weight

1500 Kg

1500 Kg


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